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High-end inclinometers - evolution of digital platform towards performance, safety and sensor fusion
Oxidation of high area ratio silicon microchannels fabricated by electrochemical etching
Mikroanalytik der Titanlegierungen
A novel process for etching modulated profiles
An integrated resonant accelerometer microsystem for automotive applications
Herstellung eines analog ansteuerbaren Mikrospiegelarrays
Static and dynamic indentation response of fine grained boron carbide
Fabrication of microshutter arrays for space application
Choice of interface microrelief morphology for GaAs surface barrier solar cells
The influence of high temperature due to high adhesion condition on rail damage
Deep Reactive-Ion Etched Micro Valves for Spacecraft Propulsion
A self-diagnostic airbag accelerometer with skew-symmetric proof-mass
Simulation of polymer film and surface behaviour in a space environment
Design and fabrication of infrared detector arrays for satellite attitude control
Wafer scale integration enabling space science