We report on the design, and test setup of a silicon diaphragm micro valve.
Deep Reactive-Ion Etched Micro Valves for Spacecraft Propulsion
NanoSpace 98, International Conference on Intergrated Nano/Microtechnology for Space Appl.
1998-11-01
Aufsatz (Konferenz)
Keine Angabe
Englisch
British Library Conference Proceedings | 1994
Springer Verlag | 2015
|NTIS | 1993
TIBKAT | 1995
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