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41–60 von 66 Ergebnissen
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    Investigation on total scattering at 157 nm and 193 nm [4099-09]

    Kadkhoda, P. / Welling, H. / Gunster, S. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Spectrophotometric determination of absorption in the DUV/VUV spectral range for MgF~2 and LaF~3 thin films [4099-35]

    Gunster, S. / Ristau, D. / Bosch, S. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Characteristics of tantalum oxynitride films prepared by rf magnetron sputtering [4099-30]

    Jong, C. A. / Chin, T. S. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    New purged UV spectroscopic ellipsometer to characterize thin films and multilayers at 157 nm [4099-25]

    Boher, P. / Evrard, P. / Piel, J.-P. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Standardization in optics characterization (Invited Paper) [4099-14]

    Ristau, D. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    X-ray study of surfaces and interfaces [4449-31]

    Asadchikov, V. E. / Bukreeva, I. N. / Duparre, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Versatile optical system for static and dynamic thermomagnetic recording using a scanning laser microscope [4449-26]

    Clegg, W. W. / Jenkins, D. F. / Helian, N. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Advantages of a new subnanometer aspheric profiling technique with respect to the unique requirements of EUV lithography mirrors [4449-24]

    Glenn, P. E. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Effects of particle shape on particle identification and scatter predictions [4449-18]

    Ivakhnenko, V. I. / Stover, J. C. / Scheer, C. A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    X-ray study of the roughness of surfaces and interfaces [4099-12]

    Kozhevnikov, I. V. / Asadchikov, V. E. / Bukreeva, I. N. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Variable angle spectroscopic ellipsometry in the vacuum ultraviolet (Invited Paper) [4099-24]

    Woollam, J. A. / Hilfiker, J. N. / Tiwald, T. E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    2D-area/3D-volume holographic optical storage nanotechnology [4099-22]

    Thomas, M. E. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Methods, error influences, and limits for the ultraprecise measurement of slope and figure for large, slightly nonflat, or steep complex surfaces [4099-18]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    New procedure for the optical characterization of high-quality thin films [4099-16]

    Bosch, S. / Leinfellner, N. / Quesnel, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Nondestructive film thickness measurement using atomic force microscopy at ultrasonic frequencies [4099-06]

    Crozier, K. B. / Yaralioglu, G. G. / Degertekin, F. L. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Optical microscopy at sub-0.1-mum resolution for semiconductor applications [4099-03]

    Vollrath, W. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Advanced methods for surface and subsurface defect characterization of optical components [4099-34]

    Steinert, J. / Gliech, S. / Wuttig, A. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Accuracy of the thin metallic wires diameter using Fraunhofer diffraction technique [4099-31]

    Serroukh, I. / Martinez-Anton, J. C. / Bernabeu, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Ellipsometry: a sophisticated tool for optical metrology (Invited Paper) [4099-23]

    Azzam, R. M. A. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries