HSG-IMIT is developing a new silicon rate gyroscope of very small size, low cost, and high performance. The device is called MARS-RR, which means micromachined angular rate sensor with two rotary oscillation modes. First prototypes, MARS-RRI yielded random walk and bias stability as low as 0.27 deg/ square root h and 65 deg/h, respectively. The noise equivalent rate (3 sigma ) corresponds to a resolution of 0.096 deg/s in a 50 Hz bandwidth. This performance is achieved by a new sensor design featuring decoupling of the actuation and the detection oscillation modes. Because of decoupling the modes mechanical and electromechanical crosstalk, one main error source of micromachined gyros, can be reduced and therefore the zero rate output (ZRO) almost disappears. Despite the small sensor area of 6 mm2 the detection capacitance amounts to about 3 pF. Thus subatomic deflections are detectable and a high sensitivity is achieved. MARS-RR1 was manufactured within the Bosch Foundry process and therefore it was possible for us to reduce the development time considerably.


    Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    A new silicon rate gyroscope


    Beteiligte:
    Geiger, W. (Autor:in) / Folkmer, B. (Autor:in) / Merz, J. (Autor:in) / Sandmaier, H. (Autor:in) / Lang, W. (Autor:in)


    Erscheinungsdatum :

    1998


    Format / Umfang :

    6 Seiten, 14 Quellen




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    A New Silicon Rate Gyroscope with Decoupled Oscillation Modes

    Geiger, W. et al. | British Library Conference Proceedings | 1998


    A Non Vacuum Packaged Silicon Micro Gyroscope

    Chang, Hyun Kee / Lee, Yong Sung | SAE Technical Papers | 2006


    A non vacuum packed silicon micro gyroscope

    Lee,Y.S. / Chang,H.K. / Hyundai Motor,KR et al. | Kraftfahrwesen | 2006


    Gyroscope

    Tenot, A. | Engineering Index Backfile | 1945


    Micromachined Gyroscope in Silicon-On-Insulator (SOI) Technology

    Gaisser, A. | British Library Conference Proceedings | 2002