This paper presents the design, fabrication, and testing of a 50µ m-thick, 5x5mm silicon bulk micro machined non-vacuum packaged gyroscope. The laterally moving vibratory gyroscope is mechanically decoupled in driving and sensing modes with a small damping coefficient. The gyroscope was fabricated by single step of deep RIE process for the silicon-glass bonded wafer. The gyroscope was measured the capacitance change with 81kHz carrier signals and modulated twice by the carrier and driving signals to reduce the driving noises and the parasitic capacitances. A dynamic range of ±200deg/s with nonlinearity less than 0.5% was measured under atmospheric pressure. The resolution with a quality factor of 1260 was measured to 0.011deg/sec by PCB based op-amps circuitry.


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    Titel :

    A Non Vacuum Packaged Silicon Micro Gyroscope


    Weitere Titelangaben:

    Sae Technical Papers


    Beteiligte:
    Chang, Hyun Kee (Autor:in) / Lee, Yong Sung (Autor:in)

    Kongress:

    SAE 2006 World Congress & Exhibition ; 2006



    Erscheinungsdatum :

    2006-04-03




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch


    Schlagwörter :


    A non vacuum packed silicon micro gyroscope

    Lee,Y.S. / Chang,H.K. / Hyundai Motor,KR et al. | Kraftfahrwesen | 2006


    Principles Of The Electric Vacuum Gyroscope

    Farrior, James S. / Roberson, Robert E. | AIAA | 1962


    High Vacuum Circumferentially Distributed Quad Mass MEMS Gyroscope Based on All-Silicon Process

    Fangyuan, Zhang / Xin, Yan / Yong, Wang et al. | Springer Verlag | 2022


    A new silicon rate gyroscope

    Geiger, W. / Folkmer, B. / Merz, J. et al. | Tema Archiv | 1998