This paper presents a review of recent results of silicon carbide (SiC) piezoresistive pressure transducers that have been demonstrated to operate up to 600 deg C. The results offer promise to extend pressure measurement to higher temperatures beyond the capability of conventional semiconductor pressure transducers. The development also provides three immediate significant technological benefits: i) wider frequency bandwidth (overcomes acoustic attenuation associated with pitot tubes), ii) accuracy (improved stable output at high temperature), and iii) reduced packaging complexity (no package cooling required). Operation at 600 deg C provides immediate applications in military and commercial jet engines in which critical static and dynamic pressure measurements are performed to improve engine performance (i.e., reduced emission and combustor instabilities) and improved CFD code validation. The pressure sensor is packaged by a novel MEMS direct chip attach (MEMS-DCA) technique that eliminates the need for wire bonding, thereby removing some reliability issues encountered at high temperature. Generally, at 600 deg C the full-scale output (FSO) of these transducers drops by about 50-65 % of the room temperature values, which can be compensated for with external signal conditioning circuitry.


    Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Stable 600 deg C silicon carbide MEMS pressure transducers


    Beteiligte:
    Okojie, R.S. (Autor:in)


    Erscheinungsdatum :

    2007


    Format / Umfang :

    11 Seiten, 15 Quellen





    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch





    Dynamic pressure measurements using silicon carbide transducers

    Ned, A.A. / Masheeb, F. / Kurtz, A.D. et al. | IEEE | 2001


    Dynamic Pressure Measurements Using Silicon Carbide Transducers

    Beheim, G. / Ned, A. / Masheeb, F. et al. | British Library Conference Proceedings | 2001


    Micromachining techniques for silicon carbide MEMS

    Zorman, Christian / Rajan, Narayanan / Mehregany, Mehran | AIAA | 1999


    Very high temperature silicon on silicon pressure transducers

    Kurtz, Anthony D. / Nunn, Timothy A. / Briggs, Stephen A. et al. | NTRS | 1992