This paper reports a micromachined gyroscope with a 2-DoF sense-mode oscillator that provides a flat region in the sense-mode frequency response curve, where the amplitude and phase of the response are insensitive to parameter fluctuations. The sensitivity is also improved by utilizing dynamical amplification of oscillations in the 2-DoF sense-mode oscillator. Thus, improved long-term stability and robustness to fabrication variations, structural and thermal parameter fluctuations and vacuum degradations are achieved, solely by the mechanical system design. Bulk micromachined prototype gyroscopes exhibited a measured noise-floor of 0.64deg of angle/s/Hz0.5 over a 50 Hz bandwidth at atmospheric pressure. The sense-mode response in the flat operating region was also experimentally demonstrated to be inherently insensitive to pressure, temperature and DC bias variations.
Robust micromachined gyroscopes for automotive applications
Robuste mikrogefertigte Gyroskope für den Einsatz in Kraftfahrzeugen
2005
4 Seiten, 7 Bilder, 2 Quellen
Aufsatz (Konferenz)
Englisch
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