Semiconductor sensors continue to expand in importance as automotive electronics provide improved efficiency, comfort, and safety. Sensors are needed to convert mechanical phenomena into an electrical signal. Two of the most common sensors in use today are pressure sensors and accelerometers. Both employ common micromachining practices and integrated circuit technology to form efficient data collection subsystems.
Micromachined electromechanical sensors for automotive applications
1998
5 Seiten
Aufsatz (Konferenz)
Englisch
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