Automotive systems are going to include a growing number of electronic systems and sensors. This paper describes some examples of micro sensors and actuators and their fabrication technologies developed in Chemnitz. Inclination sensors for inertial sensors: A sensitive element of an 1 g acceleration sensor was fabricated by conventional wet anisotropic etching of Si. Packaged with two glass cover plates containing detection electrodes, the device can be used for inclination measurement in a range up to +/- 90 deg with high accuracy and stability. An increasing number of airbags in a car causes new challenges on the wiring of igniters. For such systems it is advantageously to have an ignition element that requires a very low ignition energy. With hafnium hydride as ignition material the energy can be lowered down to the range of 70 ... 300 microJ. Hafnium hydride is used as a thin film bridge on an insulating substrate. The deposition of the ridge material was done by sputtering of hafnium, followed by a transformation to HfHx in a H2 atmosphere. Aluminium pads connecting the HfHx bridge are used for wire bonding to the socket.
MEMS for automotive applications
MEMS für Anwendungen im Automobilbau
2004
6 Seiten, 8 Bilder, 4 Quellen
Aufsatz (Konferenz)
Englisch
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