Excimer lasers are finding increasing use in the area of laser materials processing. Of particular importance is the fact that excimers can remove material through ablation rather than by any purely thermal process such as those associated with YAG or CO2 processing. This paper reviews the basic mechanisms associated with excimer laser ablation and presents examples of practical applications of this new technique.
Ablation of Organic Materials with Excimer Lasers
New Developments and Applications in Gas Lasers ; 1987 ; Los Angeles,CA,United States
Proc. SPIE ; 0737
1987-04-06
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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