We present a novel non-contact holographic optical profilometer, which is light weight, compact and relatively simpler. Computer simulation results reveal that surface measurements with sub-micron resolution are possible both in the horizontal and vertical directions.
Holographic optical profilometer
7th Mtg in Israel on Optical Engineering ; 1990 ; Tel-Aviv,Israel
Proc. SPIE ; 1442
1991-04-01
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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