We propose a 3‐DOF inchworm‐type microactuator that uses levitation generated by vertical vibration. The vertical vibration is created by a piezoelectric actuator. The inchworm typically consists of thrust elements and clamp elements. The proposed inchworm, however, does not use any clamp elements. Four levitation elements are connected with four thrust elements, which are stacked‐type piezoelectric actuators. The levitation element consists of a mass, a piezoelectric actuator, and a plate. The vertical vibration of the piezoelectric actuator lifts the levitation elements, which eliminates any friction. By controlling the order of the deformation of the horizontal piezoelectric actuators and the vibration of the vertical piezoelectric actuators, the inchworm engages in linear and rotational motion. The levitation height and the linear and rotational displacement of the inchworm were measured. Experimental results demonstrated the feasibility of the proposed 3‐DOF inchworm. The mechanism described in this paper is effective for a precision positioning system in a clean room.


    Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    A 3‐DOF Inchworm Using Levitation Caused by Vertical Vibration



    Erschienen in:

    Erscheinungsdatum :

    2016




    Medientyp :

    Aufsatz (Zeitschrift)


    Format :

    Print


    Sprache :

    Englisch



    Klassifikation :

    Lokalklassifikation TIB:    770/5600/8000
    BKL:    53.00 Elektrotechnik: Allgemeines / 52.53 / 53.00 / 53.33 / 53.31 / 53.33 Elektrische Maschinen und Antriebe / 53.31 Elektrische Energieübertragung / 52.53 Kraftwerkstechnik



    An Inchworm Using Levitation Caused by Vertical Vibration

    Torii, Akihiro | Online Contents | 2015



    Inchworm Actuator

    Bamford, Robert M. | NTRS | 1994


    Inchworm-imitating mobile robot

    ZHU MINGLEI / XIE MIN / TENG YUNLONG et al. | Europäisches Patentamt | 2024

    Freier Zugriff

    Bionic inchworm crawling robot

    SHEN GUOLI / SUNG TAE-HONG / ZHOU YUHANG et al. | Europäisches Patentamt | 2023

    Freier Zugriff