Fast deposition of microcrystalline Si films from SiH2Cl2 using a high-density microwave plasma source for Si thin-film solar cells
Solar energy materials & solar cells ; 94 , 3
2010
Aufsatz (Zeitschrift)
Englisch
Ultrafast deposition of microcrystalline silicon films using high-density microwave plasma
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|Ultrafast deposition of microcrystalline silicon films using high-density microwave plasma
Online Contents | 2009
|Properties of amorphous silicon solar cells fabricated from SiH2Cl2
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