Fast deposition of microcrystalline silicon films with preferred (220) crystallographic texture using the high-density microwave plasma
Solar energy materials & solar cells ; 74 , 1
2002
Aufsatz (Zeitschrift)
Englisch
Ultrafast deposition of microcrystalline silicon films using high-density microwave plasma
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|Ultrafast deposition of microcrystalline silicon films using high-density microwave plasma
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