Technique shows promise for fabrication of novel electronic, optoelectronic, and electro-optical devices. Experiments demonstrated feasibility of growing microscopic single-crystal CoSi2 structures beneath surfaces of Si substrates.
Subsurface Growth Of Silicide Structures In Silicon
NASA Tech Briefs ; 17 , 11
1993-11-01
Sonstige
Keine Angabe
Englisch
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