More mirrors provide additional wavelength selectivity. Four-mirror x-ray and extreme-ultraviolet monochromator provides narrower wavelength passband than devices described in "Compact X-Ray and Extreme Ultraviolet Monochromator" (MFS-28499) and "Scanning X-Ray or Extreme Ultraviolet Monochromator" (MFS-28492). Relies on Bragg reflection from two identical parallel multilayer mirrors to extract narrow-spectrum x-ray or extreme-ultraviolet beam from broad-spectrum input beam.
Four-Mirror X-Ray And Extreme-Ultraviolet Monochromator
NASA Tech Briefs ; 15 , 6
1991-06-01
Sonstige
Keine Angabe
Englisch
Compact X-Ray And Extreme-Ultraviolet Monochromator
NTRS | 1991
|Scanning X-Ray Or Extreme-Ultraviolet Monochromator
NTRS | 1991
|Extreme Ultraviolet Lithography
British Library Online Contents | 1999
|Extreme ultraviolet lithography
British Library Conference Proceedings | 1997
|