Fluidized-bed chemical cleaning process developed to remove metallic impurities from small silicon particles. Particles (250 micrometer in size) utilized as seed material in silane pyrolysis process for production of 1-mm-size silicon. Product silicon (1 mm in size) used as raw material for fabrication of solar cells and other semiconductor devices. Principal cleaning step is wash in mixture of hydrochloric and nitric acids, leaching out metals and carrying them away as soluble chlorides. Particles fluidized by cleaning solution to assure good mixing and uniform wetting.


    Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen


    Exportieren, teilen und zitieren



    Titel :

    Fluidized-Bed Cleaning of Silicon Particles


    Beteiligte:

    Erschienen in:

    Erscheinungsdatum :

    1987-10-01



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :


    Fluidized-Bed Particles Scavenge Silicon Fines

    Hsu, G. C. / Rohatgi, N. / Lutwack, R. et al. | NTRS | 1985


    Modelling of laser cleaning of metallic particles on silicon substrates

    Arronte, M. / Neves, P. / Vilar, R. et al. | IEEE | 2003


    Fluidized-Bed Deposition Of Single-Crystal Silicon

    Hsu, George C. / Rohatgi, Naresh K. | NTRS | 1988


    Extracting Silicon Product From Fluidized-Bed Reactors

    Hsu, G. C. / Rohatgi, N. K. / Morrison, A. D. | NTRS | 1986


    Polycrystalline silicon cleaning crane

    SHEN XIAOFANG / WANG YONGSHENG / YUAN PANPAN et al. | Europäisches Patentamt | 2024

    Freier Zugriff