Silicon particles continuously removed from bottom of fluidizedbed reactor when grown to large size. In reactor, silane (SiH4) flows through bed of small silicon seed particles at temperature of 650 degrees to 700 degrees C. Silane decomposes into silicon vapor and hydrogen gas, and vapor deposits as solid on seed particles. With withdrawal system, reactor operates continuously.
Extracting Silicon Product From Fluidized-Bed Reactors
NASA Tech Briefs ; 9 , 3
01.01.1986
Sonstige
Keine Angabe
Englisch
Development of fluidized bed reactors for silicon production
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