Silicon particles continuously removed from bottom of fluidizedbed reactor when grown to large size. In reactor, silane (SiH4) flows through bed of small silicon seed particles at temperature of 650 degrees to 700 degrees C. Silane decomposes into silicon vapor and hydrogen gas, and vapor deposits as solid on seed particles. With withdrawal system, reactor operates continuously.


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    Titel :

    Extracting Silicon Product From Fluidized-Bed Reactors


    Beteiligte:
    Hsu, G. C. (Autor:in) / Rohatgi, N. K. (Autor:in) / Morrison, A. D. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    01.01.1986



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :




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    Kapur, V. / Sanjurjo, A. / Sancier, K. M. et al. | NTRS | 1982


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    Hsu, G. C. / Rohatgi, N. / Lutwack, R. et al. | NTRS | 1985


    Fluidized-Bed Deposition Of Single-Crystal Silicon

    Hsu, George C. / Rohatgi, Naresh K. | NTRS | 1988