The safety of NASA's in house microelectronics facility is addressed. Industrial health standards, facility emission control requirements, operation and safety checklists, and the disposal of epitaxial vent gas are considered.


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    Titel :

    Facility safety study


    Erscheinungsdatum :

    01.10.1979


    Medientyp :

    Report


    Format :

    Keine Angabe


    Sprache :

    Englisch




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