Feasibility study looks at effectiveness of silicon nitride passivation coating against moisture and mobile ions. Coating was tested on CMOS microcircuits. Tests included temperature cycling, high-temperature electrical stress, and temperature and humidity exposure. Report concludes plastic-encapsulated circuits with protective coating exhibit high survival rates; it includes tables summarizing test results and figures that show effects of flexing.
Silicon nitride passivation of IC's
NASA Tech Briefs ; 5 , 2
1980-09-01
Sonstige
Keine Angabe
Englisch
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