The main aim of this research was to explore relationships between deposition parameters and properties of zinc and zirconium oxide films prepared by reactive pulsed laser deposition on different substrates. The structural, electrical and optical properties of grown films were investigated as a function of deposition parameters and thermodynamical conditions into the deposition chamber. On the basis of obtained results, we have developed a simple method for manufacturing of thin films without the annealing stage. Also, the main properties of grown films have been measured.
Application of laser beam technology for preparation of oxide thin films
01.01.2003
225264 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Application of Pulsed Laser Beam Technology for Deposition of Oxide Thin Films
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