To achieve an optical hybrid integration, an optical integration platform that functions as a waveguide and also as an optical bench for device assembly must be developed. However, in the conventional waveguide structure, the thick waveguide layers formed on the substrate prevent the silicon from performing the optical bench function. To overcome this difficulty, we have proposed a silica-based waveguide on terraced silicon (STS) as the optical integration platform. This paper describes the successful application of the STS-platform to a LiNbO/sub 3/ (LN) chip hybrid integration.<>
LiNbO/sub 3/ chip assembly on silica-based waveguide on terraced silicon substrate
Proceedings of LEOS '93 ; 204-205
01.01.1993
218617 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
LiNbO~3 Chip Assembly on Silica-Based Waveguide on Terraced Silicon Substrate
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