We report on the fabrication of vibration sensors using femtosecond laser-micromachined waveguides. We micromachine an optically connected waveguide across three pieces of glass using a nJ high-repetition rate femtosecond laser oscillator in a transverse writing geometry. The three pieces are placed in close proximity of one another such that there is low loss across the segmented waveguide. The middle piece is mounted on a flexible beam and hence is affected by external forces. Vibration and acceleration are detected by monitoring the induced change in transmission through the assembly. These sensors have a linear frequency response to input vibrations and an acceleration sensitivity below 0.01 m/s/sup 2/. Moreover, the sensors exhibit a negligible temperature dependence, overcoming a serious limitation encountered in the widely used fiber Bragg grating optical sensors.


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    Titel :

    Fabrication of waveguide-based vibration sensors by femtosecond laser micromachining


    Beteiligte:
    Kamata, M. (Autor:in) / Obara, M. (Autor:in) / Gattass, R.R. (Autor:in) / Cerami, L.R. (Autor:in) / Mazur, E. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    01.01.2005


    Format / Umfang :

    1453287 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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