In order to understand the behavior of neutral particles in laser-produced plasmas used for the extreme ultraviolet light source, we have been developing a visualization system of neural particles by means of planar Rayleigh scattering and planar laser-induced fluorescence spectroscopy (LIF). Based on the measurement, influence of EUV light absorption and kinetics of Sn plasma are discussed.
Development of Visualization System of Neutral Particles Generated from Laser-Produced Plasma for EUV Light Source
2005-01-01
457786 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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