In order to understand the behavior of neutral particles in laser-produced plasmas used for the extreme ultraviolet light source, we have been developing a visualization system of neural particles by means of planar Rayleigh scattering and planar laser-induced fluorescence spectroscopy (LIF). Based on the measurement, influence of EUV light absorption and kinetics of Sn plasma are discussed.


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    Titel :

    Development of Visualization System of Neutral Particles Generated from Laser-Produced Plasma for EUV Light Source


    Beteiligte:
    Matsumoto, A. (Autor:in) / Tanaka, H. (Autor:in) / Akinaga, K. (Autor:in) / Takahashi, A. (Autor:in) / Okada, T. (Autor:in)


    Erscheinungsdatum :

    2005-01-01


    Format / Umfang :

    457786 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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