In this paper photonic crystal structures were fabricated with a shot by shot method. By utilizing two-photon photopolymerisation feature size can be decreased to less than 300 nm. Feature height can be accurately controlled by using different sized obstructions.
Height controllable two-dimensional photonic crystal structures fabricated with two-photon photopolymerisation
01.01.2003
71891 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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