Summary form only given. Optical scanners are used in a wide variety of applications. Scanning micromirrors fabricated using the micromachining technology is very attractive because of smaller size, lighter mass, and lower power consumption. In this paper, we report on the performance of an out-of-plane tilt torsion mirror that can be self-assembled by the integrated scratch drive actuator (SDA). This device is compact, lightweight, and can be mass-produced at potentially very low cost.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Self-assembled micro-scanner fabricated by surface-micromachining technology


    Beteiligte:
    Su, G.D. (Autor:in) / Wu, M.C. (Autor:in)


    Erscheinungsdatum :

    01.01.1999


    Format / Umfang :

    312876 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Metallic micro displacement capacitive sensor fabricated by laser micromachining technology

    Lai, Y. / Bordatchev, E. V. / Nikumb, S. K. | British Library Online Contents | 2006


    Vertical Three-Dimensional Micro-Fresnel Lenses Fabricated by Micromachining Technique

    Lin, L. Y. / Lee, S. S. / Pister, K. S. J. et al. | British Library Conference Proceedings | 1994


    Aviation-oriented Micromachining Technology-Micro-ECM in Pure Water

    Huaiqian, B. / Jiawen, X. / Ying, L. | British Library Online Contents | 2008