Summary form only given. Optical scanners are used in a wide variety of applications. Scanning micromirrors fabricated using the micromachining technology is very attractive because of smaller size, lighter mass, and lower power consumption. In this paper, we report on the performance of an out-of-plane tilt torsion mirror that can be self-assembled by the integrated scratch drive actuator (SDA). This device is compact, lightweight, and can be mass-produced at potentially very low cost.
Self-assembled micro-scanner fabricated by surface-micromachining technology
01.01.1999
312876 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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