A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.


    Zugriff

    Download


    Exportieren, teilen und zitieren



    Titel :

    Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method


    Beteiligte:

    Erscheinungsdatum :

    12.09.2017


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS , Messen der Länge, der Dicke oder ähnlicher linearer Abmessungen / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / H02K Dynamoelektrische Maschinen , DYNAMO-ELECTRIC MACHINES / G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM , Geräte oder Anordnungen zum Aufnehmen, Projizieren oder Betrachten von Fotografien / B64C AEROPLANES , Flugzeuge / G03F Fotomechanische Herstellung strukturierter oder gemusterter Oberflächen, z.B. zum Drucken, zum Herstellen von Halbleiterbauelementen , PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES



    CALIBRATION DEVICE, IMAGING APPARATUS, MOVABLE BODY, AND CALIBRATION METHOD

    YAMANAKA KAZUKI | Europäisches Patentamt | 2021

    Freier Zugriff

    MOVABLE BODY DRIVE UNIT

    KAMATA TATSUYA / TSUKAMOTO MICHIO / IIDA MASARU | Europäisches Patentamt | 2020

    Freier Zugriff

    DRIVE DEVICE AND MOVABLE BODY

    KOBAYASHI YUTAKA / OHIRO TAKESHI / OGAWA TAKUYA et al. | Europäisches Patentamt | 2022

    Freier Zugriff

    MOVABLE BODY DRIVE UNIT

    KAMATA TATSUYA / TSUKAMOTO MICHIO / IIDA MASARU | Europäisches Patentamt | 2020

    Freier Zugriff

    Movable body control device, movable body, movable body management system, movable body control method, and program

    SAKAMOTO TOMOKAZU / KOBASHI SHINICHIRO / ECHIZENYA TAKESHI et al. | Europäisches Patentamt | 2024

    Freier Zugriff