A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
Cryopump with controlled hydrogen gas release
2016-02-23
Patent
Elektronische Ressource
Englisch
IPC: | B60H ARRANGEMENTS OR ADAPTATIONS OF HEATING, COOLING, VENTILATING, OR OTHER AIR-TREATING DEVICES SPECIALLY FOR PASSENGER OR GOODS SPACES OF VEHICLES , Anordnung oder Einbau der Heizung, Kühlung, Lüftung oder anderer Luftbehandlungsvorrichtungen für die Fahrzeugräume für Reisende oder Fracht / B01D SEPARATION , Trennen / F04B Verdrängerkraft- und Verdrängerarbeitsmaschinen für Flüssigkeiten , POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS |
APPARATUS AND METHOD FOR CONTROLLING TEMPERATURE OF CRYOPUMP
Europäisches Patentamt | 2017
|Investigations of a Special Cryopump for High Mass Flows
NTIS | 1971
|British Library Conference Proceedings | 2018
|Boom Deploys With Controlled Energy Release
NTRS | 1983
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