Provided is a cryopump to maintain a set temperature for predetermined time even if the cryopump is turned off. The cryopump may comprise: a displacer circulating refrigerant existing therein to control an outside temperature; a heat conduction unit transferring heat in the outside of the cryopump to the refrigerant; and a heat conduction buffer unit absorbing the outside heat transferred to the refrigerant to be used as state change energy when the displacer is turned off.

    턴-오프 된 경우에도, 일정 시간 동안 설정 온도를 유지하도록 하는 저온 펌프가 제공된다. 상기 저온 펌프는 내부에 존재하는 냉매를 순환시켜 외부 온도를 조절하는 디스플레이서, 상기 저온 펌프의 외부의 열을 상기 냉매로 전달하는 열전도부 및 상기 디스플레이서가 턴-오프 된 경우, 상기 냉매로 전달되는 상기 외부의 열을 흡수하여 상태 변화 에너지로 이용하는 열전도 버퍼부를 포함할 수 있다.


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    Titel :

    APPARATUS AND METHOD FOR CONTROLLING TEMPERATURE OF CRYOPUMP


    Weitere Titelangaben:

    저온 펌프의 온도 제어 장치 및 방법


    Beteiligte:
    CHO HYOK JIN (Autor:in) / SEO HEE JUN (Autor:in) / PARK SUNG WOOK (Autor:in) / MOON GUEE WON (Autor:in)

    Erscheinungsdatum :

    2017-02-02


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Koreanisch


    Klassifikation :

    IPC:    F04B Verdrängerkraft- und Verdrängerarbeitsmaschinen für Flüssigkeiten , POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS / B64G Raumfahrt , COSMONAUTICS



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