To provide a transfer machine capable of reducing generation sites where particles are generated due to upward and downward movement of a cage and preventing diffusion of the particles.SOLUTION: In a transfer machine 10 including a cage 20 for supporting a cassette 90, and an elevating device 30 for supporting the cage 20 so as to freely move the case 20 upward and downward, the elevating device 30 includes a device main body 31 for supporting the cage 20, a support pole 32 for supporting the device main body 31, a rack 34 provided along the support pole 32, and a pinion 35 which is rotatably provided to the device main body 31 and engages with a rack 34, and a rack and pinion mechanism portion 33 that moves the device main body 31 upward and downward in the longitudinal direction of the support pole 32 by rotation of the pinion 35, and the rack and pinion mechanism portion 33 is covered with a cover 40 together with the support pole 32.SELECTED DRAWING: Figure 1

    【課題】ケージの昇降移動により発生するパーティクルの発生箇所の削減及び当該パーティクルの拡散を防止可能な移載機を提供する。【解決手段】カセット90を支持するケージ20と、ケージ20を昇降自在に支持する昇降装置30と、を備える移載機10であって、昇降装置30は、ケージ20を支持する装置本体31と、装置本体31を支持する支柱32と、支柱32に沿って設けられるラック34と、装置本体31に回転可能に設けられラック34に係合するピニオン35と、を備え、ピニオン35の回転により装置本体31を支柱32の長手方向に昇降移動させるラックアンドピニオン機構部33と、を備え、ラックアンドピニオン機構部33は、支柱32とともにカバー40によって被覆されるものである。【選択図】図1


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    Titel :

    TRANSFER MACHINE


    Weitere Titelangaben:

    移載機


    Beteiligte:

    Erscheinungsdatum :

    2020-09-03


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Japanisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last



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