The invention discloses an MEMS miniature crawling robot based on electric heating driving and a manufacturing method thereof, and relates to the technical field of miniature robotics.The crawling robot comprises moving feet and a body, the two sides of the body are each provided with the multiple moving feet, the extending directions of the multiple moving feet are the same, each moving foot comprises a cantilever beam and a first material, and the cantilever beam is connected with the first material; one end of the cantilever beam is connected with the body, the other end of the cantilever beam is a free end, a first material is stacked on the cantilever beam, a heating assembly is arranged between the cantilever beam and the first material, the thermal expansion coefficient of the first material is larger than that of the cantilever beam, and in a normal state, the free end of the cantilever beam is suspended; and the free end of the moving foot warps downwards and is in contact with the supporting surface. The invention further provides a manufacturing method of the MEMS micro crawling robot based on electrothermal driving. According to the scheme provided by the invention, the driving efficiency and the structure expansion capability of the thermal driving micro robot can be improved.
本发明公开了一种基于电热驱动的MEMS微型爬行机器人及其制作方法,涉及微型机器人技术领域,爬行机器人包括运动足和本体,本体的两侧分别设置有多个运动足,多个运动足的延伸方向相同,各运动足均包括悬臂梁和第一材料,悬臂梁的一端与本体连接,另一端为自由端,悬臂梁上堆叠有第一材料,悬臂梁和第一材料之间设置有加热组件,第一材料的热膨胀系数大于悬臂梁,常态下,悬臂梁的自由端悬空,当加热组件通电产热时,运动足的自由端向下翘曲并与支撑面接触。本发明还提供了一种基于电热驱动的MEMS微型爬行机器人的制作方法,本发明提供的方案能够提高热驱动微型机器人的驱动效率以及结构拓展能力。
MEMS (Micro Electro Mechanical System) micro crawling robot based on electrothermal driving and manufacturing method thereof
基于电热驱动的MEMS微型爬行机器人及其制作方法
10.09.2024
Patent
Elektronische Ressource
Chinesisch
IPC: | B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente , MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES / B81C Verfahren oder Geräte besonders ausgebildet zur Herstellung oder Behandlung von Mikrostrukturbauelementen oder -systemen , PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS / B62D MOTOR VEHICLES , Motorfahrzeuge |
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