The invention provides a crown block detection device which comprises a detection module arranged on a crown block grabbing device and used for detecting the chassis closing state of a wafer box; the control device is respectively connected with the detection module and the crown block braking device; the crown block grabbing device begins to ascend after grabbing an outer shell of the wafer box, and when the detection module detects that a chassis of the wafer box is not locked or completely unlocked, the control device controls the crown block brake device to stop ascending of the crown block grabbing device. The invention further discloses a detection method of the crown block detection device and a crown block carrying system. The crown block detection device provided by the invention can detect the chassis state (whether the chassis is locked) of the wafer box when the crown block grabbing device grabs the wafer box to ascend, so that the chassis of the wafer box is prevented from falling off when the crown block grabs the wafer box to ascend, and wafers are prevented from being polluted by dust in air.
本发明提供了一种天车检测装置,包括:检测模块,所述检测模块设置在天车抓取装置上用以检测晶圆盒的底盘关闭状态;控制装置,所述控制装置分别与所述检测模块以及天车制动装置连接;所述天车抓取装置抓取到晶圆盒的外壳体后开始上升,当所述检测模块检测到晶圆盒的底盘没锁好或者完全没锁时,所述控制装置控制所述天车刹车装置停止所述天车抓取装置上升。本发明还公开了一种天车检测装置的检测方法和一种天车搬运系统。本发明提供的天车检测装置可以在天车抓取装置抓取晶圆盒上升时侦测晶圆盒的底盘状态(底盘是否锁好),避免天车抓取晶圆盒上升时晶圆盒底盘掉落和避免晶圆片遭受空气中灰尘污染。
Crown block detection device, detection method thereof and crown block carrying system
一种天车检测装置及其检测方法和天车搬运系统
05.03.2024
Patent
Elektronische Ressource
Chinesisch
IPC: | B66C Krane , CRANES |
Europäisches Patentamt | 2024
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