The invention provides a thermally stable substrate for high-precision optical instrument installation, which comprises a substrate assembly and a thermal control assembly, and is characterized in that the substrate assembly comprises a heat conduction substrate, and at least two optical instrument installation positions are arranged on the heat conduction substrate at intervals; the thermal control assembly is arranged on the outer surface of the heat conduction substrate and used for temperature monitoring and temperature control of the heat conduction substrate. The heat-conducting substrate made of a high-volume-fraction aluminum-based silicon carbide material has high heat-conducting and low-expansion properties, realizes relative consistency of temperature environments of two high-precision instruments, and ensures consistency of temperature distribution of a plurality of optical instrument mounting positions, so that relative thermal deformation of the plurality of optical instrument mounting positions is small; thermal stability and high-precision and high-stability control can be realized; the electric heater and the temperature measuring point are arranged on the heat conduction substrate, real-time temperature monitoring and precise temperature control are achieved, it is guaranteed that the temperature change of the heat conduction substrate is within +/-0.5 DEG C, and therefore heat deformation of the heat conduction substrate can be reduced.
本发明提供了一种用于高精度光学仪器安装的热稳定基板,包括基板组件和热控组件,所述基板组件包括导热基板,所述导热基板上至少间隔设置有两个光学仪器安装位;所述热控组件设置在导热基板外表面,所述热控组件用于导热基板的温度监控和温度控制。采用高体分铝基碳化硅材料的导热基板,具有高导热低膨胀性能,实现了两台高精度仪器的温度环境相对一致,保证了多个光学仪器安装位温度分布的一致性,从而实现了多个光学仪器安装位的相对热变形小,进而有助于实现热稳定及高精度高稳定控制;在导热基板上设置电加热器和测温点,实现了温度实时监测及精密温控,保证了导热基板温度变化在±0.5℃之内,从而有助于降低导热基板的热变形。
Thermally stable substrate for high precision optical instrument mounting
用于高精度光学仪器安装的热稳定基板
25.08.2023
Patent
Elektronische Ressource
Chinesisch
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