Static and dynamic instabilities of electrostatic actuated MEMS devices
Statische und dynamische Instabilitaeten elektrostatisch betaetigter MEMS Bauteile.
2008
16 pages
SAE-Paper;2008-01-0915;2008;Vehicle Sensors and Actuators, 2008;SAE Spec.Publ.; SP-2191
Sonstige
Englisch
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