Simulation of an Electrostatically Actuated Micro-Machined Fabry-Perot Etalon
NanoTech 2002 - "At the Edge of Revolution" ; 2002 ; Houston , Texas
2002-01-01
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
AIAA-2002-5720 Simulation of an Electrostatically Actuated Micro-Machined Fabry-Perot Etalon
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