AIAA-2002-5720 Simulation of an Electrostatically Actuated Micro-Machined Fabry-Perot Etalon
Conference, NanoTech ; 2002 ; Houston, TX
NanoTech ; 5700/5766 ; 114-122
PAPERS- AMERICAN INSTITUTE OF AERONAUTICS AND ASTRONAUTICS ; 9 , 5700/5766
01.01.2002
9 pages
Aufsatz (Konferenz)
Englisch
NanoTech , revolution , AIAA
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