Optical/laser microlithography IV : 6 - 8 March 1991 San Jose, California
SPIE Conference on Optical/Laser Microlithography ; 4 ; 1991 ; San Jose, Calif. SPIE Conference on Optical/Laser Microlithography ; 4 (San Jose, Calif.) : 1991.03.06-08
SPIE proceedings series ; 1463
1991
XII, 754 S
28 cm
Ill., graph. Darst
Literaturangaben
Konferenzband
Englisch
DDC: | 621.36/6 |