A MEMS sandwich differential capacitive silicon-on-insulator accelerometer
MICROSYSTEM TECHNOLOGIES ; 19 , 8 ; 1249-1254
01.01.2013
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
An All-Silicon Comb-Tooth Capacitive MEMS Accelerometer
Springer Verlag | 2022
|Optimization of MEMS capacitive accelerometer
British Library Online Contents | 2013
|DataCite | 2023
|Testing of MEMS capacitive accelerometer structure through electro-static actuation
British Library Online Contents | 2013
|Design of an SOI-MEMS high resolution capacitive type single axis accelerometer
British Library Online Contents | 2010
|