Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off
MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1715-1719
01.01.2008
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Soft X-ray lithography of high aspect ratio SU8 submicron structures
British Library Online Contents | 2008
|British Library Online Contents | 2003
|