Fabrication of High Aspect Ratio SU-8 Microstructures on Piezoelectric Transducers
International conference; 2nd, Mechanical and aerospace engineering; (ICMAE) 2011) ; 2011 ; Bangkok, Thailand
2012-01-01
5 pages
Includes bibliographical references and index.
Aufsatz (Konferenz)
Englisch
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Fabrication technique for high-aspect-ratio gratings [3879-07]
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