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    Titel :

    Interferometric Lithography with a Desk-Top Size Soft X-Ray Laser


    Beteiligte:

    Kongress:

    Conference; 11th, X ray lasers ; 2008 ; Belfast, Northern Ireland



    Erscheinungsdatum :

    2009-01-01


    Format / Umfang :

    6 pages


    Anmerkungen:

    Includes bibliographical references.



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch


    Schlagwörter :


    Interferometric Lithography with a Desk-Top Size Soft X-Ray Laser

    Wachulak, P. W. / Marconi, M. C. / Rockward, W. et al. | Springer Verlag | 2009


    Interferometric lithography at 47 nm with a table-top laser

    Capeluto, M.G. / Vaschenko, G. / Marconi, M.C. et al. | IEEE | 2004


    Interferometric Lithography at 47nm with a Table-Top EUV Laser

    Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers) | British Library Conference Proceedings | 2004


    Advanced laser driver for soft x-ray projection lithography [2206-67]

    Zapata, L. E. / Beach, R. J. / Dane, C. B. et al. | British Library Conference Proceedings | 1994


    Demonstration of a desk-top size 46.9 nm laser at 12 Hz repetition rate

    Heinbuch, S. / Grisham, M. / Martz, D. et al. | IEEE | 2005