Oxidation Smoothing of Sidewall Roughness in AlGaAs Heterostructure Waveguides
18th:; ANNUAL MEETING, Lasers and Electro-Optics Society; IEEE LEOS ; 2005 ; Sydney, Australia
2005-01-01
2 pages
IEEE cat no: 05CH37693
Aufsatz (Konferenz)
Englisch
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