A Novel Micromirror Design with Coarse and Fine Tuning Capabilities
INTERNATIONAL CONFERENCE, Optical MEMS and their applications ; 2004 ; Takamatsu, Japan
2004-01-01
2 pages
Aufsatz (Konferenz)
Englisch
Optical MEMS , IEEE , LEOS
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Adjustment system and method with coarse tuning and fine tuning
Europäisches Patentamt | 2024
|Kraftfahrwesen | 1981
|British Library Online Contents | 2001
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