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    Titel :

    Optimization of Diffraction Grating Profiles in Fabrication by the Electron-Beam Lithography


    Beteiligte:

    Kongress:

    Topical meeting; 6th, Diffractive optics and micro-optics ; 2002 ; Tucson, AZ



    Erscheinungsdatum :

    01.01.2002


    Format / Umfang :

    3 pages


    Anmerkungen:

    Also known as DOMO; Includes bibliographical references and index



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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