A silicon based MEMS technology for electrostatically actuated SPDT RF switches
European space components conference ; 2002 ; Toulouse, France
2002-01-01
8 pages
Aufsatz (Konferenz)
Englisch
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
A High Speed Electrostatically Actuated Al-MEMS Micromirror Array
British Library Conference Proceedings | 2011
|Electrostatically Actuated Thin-Shell Space Structures
TIBKAT | 2023
|Electrostatically Actuated Thin-Shell Space Structures
AIAA | 2023
|