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    Titel :

    AIAA-2001-4652 Characteristics of Hermetic 6H-SiC MEMS Pressure Sensors at 600 C



    Kongress:

    Conference, Space; AIAA space 2001 conference ; 2001 ; Albuquerque, NM



    Erscheinungsdatum :

    2001-01-01


    Format / Umfang :

    8 pages


    Anmerkungen:

    Separate papers nos AIAA-2001-4513 to AIAA-2001-4777 with gaps. Same papers also held on 171 microfiche at s/m 6369.400F



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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