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    Titel :

    Removal process of metal thin films during laser rear patterning [4088-101]



    Kongress:

    1st, International symposium on laser precision microfabrication ; 2000 ; Omiya, Japan



    Erscheinungsdatum :

    01.01.2000


    Format / Umfang :

    4 pages


    Anmerkungen:

    Described as proceedings. Also known as LPM 2000




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Nr. 4088

    DataCite | 1923


    Preparation of metal oxide thin films using coating photolysis process with ArF excimer laser [4088-51]

    Tsuchiya, T. / Watanabe, A. / Imai, Y. et al. | British Library Conference Proceedings | 2000


    N~2 laser stereo-lithography [4088-77]

    Satoh, S. / Tanaka, T. / Hayashi, N. et al. | British Library Conference Proceedings | 2000


    Laser texturing process and surface quality control [4088-41]

    Jiang, J. / He, Y. / Yan, Y. et al. | British Library Conference Proceedings | 2000


    Excimer laser microfabrication and micromachining [4088-24]

    Gower, M. C. / Japan Laser Processing Society / Institute of Physical and Chemical Research et al. | British Library Conference Proceedings | 2000