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    Titel :

    High-resolution contact lithography by excimer lasers [4088-73]


    Beteiligte:
    Huang, H. (Autor:in) / Lu, D. (Autor:in) / Du, L. (Autor:in) / Zhao, Y. (Autor:in) / Yuan, C. (Autor:in) / Jiang, B. (Autor:in) / Wang, R. (Autor:in) / Miyamoto, I. / Sugioka, K. / Sigmon, T. W.

    Kongress:

    1st, International symposium on laser precision microfabrication ; 2000 ; Omiya, Japan



    Erscheinungsdatum :

    01.01.2000


    Format / Umfang :

    3 pages


    Anmerkungen:

    Described as proceedings. Also known as LPM 2000




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Excimer laser microfabrication and micromachining [4088-24]

    Gower, M. C. / Japan Laser Processing Society / Institute of Physical and Chemical Research et al. | British Library Conference Proceedings | 2000


    N~2 laser stereo-lithography [4088-77]

    Satoh, S. / Tanaka, T. / Hayashi, N. et al. | British Library Conference Proceedings | 2000


    Novel results of laser precision microfabrication with excimer lasers and solid state lasers [4088-22]

    Stamm, U. / Fiebig, M. / Govorkov, S. V. et al. | British Library Conference Proceedings | 2000


    Micromachining with ultrafast lasers [4088-28]

    Shihoyama, K. / Furukawa, A. / Bado, P. et al. | British Library Conference Proceedings | 2000


    High-repetition-rate ArF excimer laser for microlithography [4088-80]

    Wakabayashi, O. / Enami, T. / Ishii, K. et al. | British Library Conference Proceedings | 2000