X-ray study of the roughness of surfaces and interfaces [4099-12]
Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA
2000-01-01
12 pages
Aufsatz (Konferenz)
Englisch
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DataCite | 1924
Standardization in optics characterization (Invited Paper) [4099-14]
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|Optical characterization of doping profiles in silicon [4099-04]
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|Fast-scanning ellipsometry for thin film characterization [4099-39]
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|2D-area/3D-volume holographic optical storage nanotechnology [4099-22]
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