Standardization in optics characterization (Invited Paper) [4099-14]
Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA
2000-01-01
19 pages
Aufsatz (Konferenz)
Englisch
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
DataCite | 1924
Variable angle spectroscopic ellipsometry in the vacuum ultraviolet (Invited Paper) [4099-24]
British Library Conference Proceedings | 2000
|Lithography: a look at what is ahead (Invited Paper) [4099-01]
British Library Conference Proceedings | 2000
|Ellipsometry: a sophisticated tool for optical metrology (Invited Paper) [4099-23]
British Library Conference Proceedings | 2000
|Optical characterization of doping profiles in silicon [4099-04]
British Library Conference Proceedings | 2000
|